Development of a Post-CMOS Compatible Nanoporous Thin Film layer Based on Al2O3

London [u.a.] / Institute of Physics (2018) [Contribution to a book, Contribution to a conference proceedings]

International Conference on Nanomaterials and Biomaterials (ICNB 2017) : 11-13 December 2017, Amsterdam, The Netherlands / conference co-chairs: Prof. Carlo Montemagno (University of Alberta, Canada), Prof. Kwang Leong Choy (University College London, UK), Prof. Detlef W. Bahnemann (Leibniz University of Hannover, Germany)
Page(s): 012001

Authors

Selected Authors

Dogan, .
Buschhausen, A.
Walk, C.
Mokwa, Wilfried
Vogt, H.

Identifier