Wafer-Scale Nanoimprint Lithography Process Towards Complementary Silicon Nanowire Field-Effect Transistors for Biosensor Applications

Weinheim / Wiley-VCH (2018) [Contribution to a book, Journal Article]

Physica status solidi / A
Volume: 215
Issue: 15
Page(s): 1800234

Authors

Selected Authors

Müller, Achim
Vu, Xuan Thang
Pachauri, Vivek
Francis, Laurent A.
Flandre, Denis

Other Authors

Ingebrandt, Sven

Identifier