A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes

Berlin / VDE VERLAG (2017) [Contribution to a book, Contribution to a conference proceedings]

MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in München

Authors

Selected Authors

Walk, C.
Görtz, M.
Mokwa, Wilfried
Vogt, H.

Identifier

  • REPORT NUMBER: RWTH-2017-10427