Thinned capacitive pressure sensors in flexible and stretchable extra soft substrates for tactile sensing; Studies on output signal bending dependence

Berlin / VDE VERLAG (2017) [Contribution to a book, Contribution to a conference proceedings]

MikroSystemTechnik Kongress 2017 : MEMS, Mikroelektronik, Systeme 23.-25. Oktober 2017 in München

Authors

Selected Authors

Fischer, Roland
Weichsel, L.
Görtz, M.
Mokwa, Wilfried

Identifier

  • REPORT NUMBER: RWTH-2017-10425