Development of a post-CMOS compatible nanoporous Al2O3 thin film layer

(2017) [Contribution to a conference proceedings]

[International Conference on Nanomaterials and Biomaterials, ICNB 2017, 2017-12-11 - 2017-12-13, Amsterdam, Netherlands]

Authors

Selected Authors

Dogan, O.
Buschhausen, Armin
Walk, C.
Mokwa, Wilfried
Vogt, H.

Identifier

  • REPORT NUMBER: RWTH-2017-10424